Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

Tao H., Strikwerda A. C. , Liu M., Mondia J. P. , Ekmekci E., Fan K., ...More

APPLIED PHYSICS LETTERS, vol.97, no.26, 2010 (Peer-Reviewed Journal) identifier identifier

  • Publication Type: Article / Article
  • Volume: 97 Issue: 26
  • Publication Date: 2010
  • Doi Number: 10.1063/1.3533367
  • Journal Indexes: Science Citation Index Expanded, Scopus


We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications. (C) 2010 American Institute of Physics. [doi:10.1063/1.3533367]